Equipment Lineup
Front end
Small Vacuum/Atmosphere Furnace KVA40/50
| ID | F001165 |
|---|---|
| Manufacturer | Kurata Giken |
| Model | KVA40/50 |
| Vintage | 2012 |
stepper：NSR i14E
| ID | F000978 |
|---|---|
| Manufacturer | Nikon |
| Model | NSR i14E |
| Vintage | --- |
Vacuum Furnace
| ID | F000977 |
|---|---|
| Manufacturer | Kurata Technology |
| Model | --- |
| Vintage | --- |
Evaporation Equipment：CME-70
| ID | F000968 |
|---|---|
| Manufacturer | CANON TOKKI |
| Model | CME-70 |
| Vintage | --- |
Ultratech 1500MVS
| ID | F000967 |
|---|---|
| Manufacturer | UltratechStepper |
| Model | Ultratech 1500MVS |
| Vintage | --- |
RIEEtcher：DEA-506
| ID | F000876 |
|---|---|
| Manufacturer | CANON ANELVA |
| Model | DEA-506 |
| Vintage | --- |
Sputtrering System：SME-200E
| ID | F000875 |
|---|---|
| Manufacturer | ULVAC |
| Model | SME-200E |
| Vintage | --- |
Sputtering machine SV-9045
| ID | F000735 |
|---|---|
| Manufacturer | Ulvac |
| Model | SV-9045 |
| Vintage | --- |
Evaporation Equipment：ei-7K
| ID | F000699 |
|---|---|
| Manufacturer | Ulvac |
| Model | ei-7K |
| Vintage | --- |
Lithography equipment：UX-4023SC-AKF02
| ID | F000671 |
|---|---|
| Manufacturer | USHIO |
| Model | UX-4023SC-AKF02 |
| Vintage | --- |
12-inch wafer transfer machine : OCRSC131-001-001
| ID | F000538 |
|---|---|
| Manufacturer | RORZE CORPORATION |
| Model | OCRSC131-001-001 |
| Vintage | --- |
SOLD OUT
Evaporation Equipment：EX900-D14
| ID | F000666 |
|---|---|
| Manufacturer | Ulvac |
| Model | EX900-D14 |
| Vintage | --- |
SOLD OUT
Sputtering machine：SIH-450
| ID | F000665 |
|---|---|
| Manufacturer | Ulvac |
| Model | SIH-450 |
| Vintage | --- |
SOLD OUT
Excimer laser unit : G10K-2
| ID | F000533 |
|---|---|
| Manufacturer | KOMATSU |
| Model | G10K-2 |
| Vintage | --- |
