Equipment Lineup
Parts

Θ axis driver M-ESA-JB015AF2-11
| ID | P000871 |
|---|---|
| Manufacturer | NSK |
| Model | Θ axis driver M-ESA-JB015AF2-11 |
| Vintage | --- |

Spinner Table 6 inch D TBLOB-00002-0
| ID | P000869 |
|---|---|
| Manufacturer | --- |
| Model | Spinner Table 6 inch D TBLOB-00002-0 |
| Vintage | --- |

Porous Chuck Table 6 inch D MAJMR006–B
| ID | P000868 |
|---|---|
| Manufacturer | --- |
| Model | Porous Chuck Table 6 inch D MAJMR006--B |
| Vintage | --- |

Porous 8-inch chuck table MAELRA02–AZ
| ID | P000867 |
|---|---|
| Manufacturer | --- |
| Model | Porous 8-inch chuck table MAELRA02--AZ |
| Vintage | --- |

Porous 8-inch chuck table MAELRA02–AZ
| ID | P000866 |
|---|---|
| Manufacturer | --- |
| Model | Porous 8-inch chuck table MAELRA02--AZ |
| Vintage | --- |

PCB(I/F) card PBPCB-0161
| ID | P000865 |
|---|---|
| Manufacturer | --- |
| Model | PCB(I/F) card PBPCB-0161 |
| Vintage | --- |

Glass scale MOEDY00201A
| ID | P000864 |
|---|---|
| Manufacturer | Sony |
| Model | Glass scale MOEDY00201A |
| Vintage | --- |

Surface sheet assembly GEDAD320-007
| ID | P000863 |
|---|---|
| Manufacturer | --- |
| Model | Surface sheet assembly GEDAD320-007 |
| Vintage | --- |

COMM I/F card FBPCB-0172
| ID | P000862 |
|---|---|
| Manufacturer | --- |
| Model | COMM I/F card FBPCB-0172 |
| Vintage | --- |

BBD/COUNT card FBPCB-0153
| ID | P000861 |
|---|---|
| Manufacturer | --- |
| Model | BBD/COUNT card FBPCB-0153 |
| Vintage | --- |

PCB(ADD RAM 2M) card FBPCB-0065
| ID | P000860 |
|---|---|
| Manufacturer | --- |
| Model | PCB(ADD RAM 2M) card FBPCB-0065 |
| Vintage | --- |

Scale head BS75A-170NT01
| ID | P000859 |
|---|---|
| Manufacturer | Sony Manufacturing systems |
| Model | Scale head BS75A-170NT01 |
| Vintage | --- |

SENSOR ASSY (THETA) FJTR-910004-5
| ID | P000858 |
|---|---|
| Manufacturer | --- |
| Model | SENSOR ASSY (THETA) FJTR-910004-5 |
| Vintage | --- |

TPB-SA.V0 card FBPCB-0348
| ID | P000857 |
|---|---|
| Manufacturer | --- |
| Model | TPB-SA.V0 FBPCB-0348 |
| Vintage | --- |

16DO/H (COMM) card FBPCB-0258
| ID | P000856 |
|---|---|
| Manufacturer | --- |
| Model | 16DO/H (COMM) FBPCB-0258 |
| Vintage | --- |

16DI/H (COMM) card FBPCB-0257
| ID | P000855 |
|---|---|
| Manufacturer | --- |
| Model | 16DI/H (COMM) FBPCB-0257 |
| Vintage | --- |

Chemical tank CT-U25N-1
| ID | P000854 |
|---|---|
| Manufacturer | IWAKI |
| Model | CT-U25N-1 |
| Vintage | --- |

Inverter SE07-18W
| ID | P000853 |
|---|---|
| Manufacturer | Sinano Electric |
| Model | SE07-18W |
| Vintage | --- |

AC servo driver X MQDB045D1A04
| ID | P000847 |
|---|---|
| Manufacturer | Panasonic |
| Model | MQDB045D1A04 |
| Vintage | --- |

AC servo driver Y MQDB025D1A04
| ID | P000846 |
|---|---|
| Manufacturer | Panasonic |
| Model | MQDB025D1A04 |
| Vintage | --- |

