Equipment Lineup
Parts

Motor Control Board FBPCB-0076R5
| ID | P000878 | 
|---|---|
| Manufacturer | --- | 
| Model | Motor Control Board FBPCB-0076R5 | 
| Vintage | --- | 

Θ axis driver M-ESA-JB015AF2-11
| ID | P000871 | 
|---|---|
| Manufacturer | NSK | 
| Model | Θ axis driver M-ESA-JB015AF2-11 | 
| Vintage | --- | 

Spinner Table 6 inch D TBLOB-00002-0
| ID | P000869 | 
|---|---|
| Manufacturer | --- | 
| Model | Spinner Table 6 inch D TBLOB-00002-0 | 
| Vintage | --- | 

Porous Chuck Table 6 inch D MAJMR006–B
| ID | P000868 | 
|---|---|
| Manufacturer | --- | 
| Model | Porous Chuck Table 6 inch D MAJMR006--B | 
| Vintage | --- | 

Porous 8-inch chuck table MAELRA02–AZ
| ID | P000867 | 
|---|---|
| Manufacturer | --- | 
| Model | Porous 8-inch chuck table MAELRA02--AZ | 
| Vintage | --- | 

Porous 8-inch chuck table MAELRA02–AZ
| ID | P000866 | 
|---|---|
| Manufacturer | --- | 
| Model | Porous 8-inch chuck table MAELRA02--AZ | 
| Vintage | --- | 

PCB(I/F) card PBPCB-0161
| ID | P000865 | 
|---|---|
| Manufacturer | --- | 
| Model | PCB(I/F) card PBPCB-0161 | 
| Vintage | --- | 

Glass scale MOEDY00201A
| ID | P000864 | 
|---|---|
| Manufacturer | Sony | 
| Model | Glass scale MOEDY00201A | 
| Vintage | --- | 

Surface sheet assembly GEDAD320-007
| ID | P000863 | 
|---|---|
| Manufacturer | --- | 
| Model | Surface sheet assembly GEDAD320-007 | 
| Vintage | --- | 

COMM I/F card FBPCB-0172
| ID | P000862 | 
|---|---|
| Manufacturer | --- | 
| Model | COMM I/F card FBPCB-0172 | 
| Vintage | --- | 

BBD/COUNT card FBPCB-0153
| ID | P000861 | 
|---|---|
| Manufacturer | --- | 
| Model | BBD/COUNT card FBPCB-0153 | 
| Vintage | --- | 

PCB(ADD RAM 2M) card FBPCB-0065
| ID | P000860 | 
|---|---|
| Manufacturer | --- | 
| Model | PCB(ADD RAM 2M) card FBPCB-0065 | 
| Vintage | --- | 

Scale head BS75A-170NT01
| ID | P000859 | 
|---|---|
| Manufacturer | Sony Manufacturing systems | 
| Model | Scale head BS75A-170NT01 | 
| Vintage | --- | 

SENSOR ASSY (THETA) FJTR-910004-5
| ID | P000858 | 
|---|---|
| Manufacturer | --- | 
| Model | SENSOR ASSY (THETA) FJTR-910004-5 | 
| Vintage | --- | 

TPB-SA.V0 card FBPCB-0348
| ID | P000857 | 
|---|---|
| Manufacturer | --- | 
| Model | TPB-SA.V0 FBPCB-0348 | 
| Vintage | --- | 

16DO/H (COMM) card FBPCB-0258
| ID | P000856 | 
|---|---|
| Manufacturer | --- | 
| Model | 16DO/H (COMM) FBPCB-0258 | 
| Vintage | --- | 

16DI/H (COMM) card FBPCB-0257
| ID | P000855 | 
|---|---|
| Manufacturer | --- | 
| Model | 16DI/H (COMM) FBPCB-0257 | 
| Vintage | --- | 

Chemical tank CT-U25N-1
| ID | P000854 | 
|---|---|
| Manufacturer | IWAKI | 
| Model | CT-U25N-1 | 
| Vintage | --- | 

Inverter SE07-18W
| ID | P000853 | 
|---|---|
| Manufacturer | Sinano Electric | 
| Model | SE07-18W | 
| Vintage | --- | 

AC servo driver X MQDB045D1A04
| ID | P000847 | 
|---|---|
| Manufacturer | Panasonic | 
| Model | MQDB045D1A04 | 
| Vintage | --- | 

